Technology
Manufacturers in a large number of industries are seeking cost-effective equipment that can lay down uniform, conformal and low-defect films with atomic-level, reproducible and robust control. As device manufacturing complexity keeps increasing, the need to deposit high quality films on complex three-dimensional shapes and area-enhanced surfaces intensifies, causing an escalation in associated cost. Sundew’s suite of patented equipment and process innovations deliver unmatched productivity and uncompromising ALD performance at the lowest cost of ownership by addressing all aspects of ALD productivity.
Download White Papers
- Strategies for high productivity ALD (Link to Solid State Technology)
- An ALD that competes with CVD's throughput? (Link to Solid State Technology)
- How ALD compares with other deposition techniques (PDF, 425 KB)