Fast and Long Lifetime ALD Valves

Valve speed and reliability are critical to ALD performance as each film deposition run requires hundreds to thousands of valve operation cycles. Sundew’s patented ALD valve technology, Fast Pneumatic Valve (FPV) provides record speed (<1 msec), breakthrough reliability (100 million cycles lifetime) and superior capabilities, including high temperature operation (220 °C), and high conductance.

Our FPVs incorporate enhanced safety features and are the only doubly contained spill-free, ultra-high-purity valves on the market.

Sundew’s integrated manifolds stack 10 FPVs to provide millisecond response and unique nanolaminate and composite film capabilities. Our manifold is the only ALD manifold that can switch composition every cycle without any throughput penalty.