Flat Panel Displays
Emerging display technologies, such as OLEDs, touch screens and flexible TFTs, require improvements in thin film technology over the current performance of Si-based TFTs. ALD can speed up development and improve yield due to its repeatable, atomic-level control, along with its high film quality, uniformity, and conformality.
Sundew’s Glider line of industrial systems enable, for the first time, high productivity, production-scale ALD manufacturing on large panels. Current generation G1000-P panel area capability is up to 1000x1000 mm. Sundew’s SMFD-ALD™ technology enables low temperature deposition at throughputs comparable to sputtering and CVD, providing a superior performance, cost-competitive alternative.